| 晶圆制造自动化组合设备的调度问题研究 |
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| 引用本文： | 潘春荣,伍乃骐. 晶圆制造自动化组合设备的调度问题研究[J]. 计算机集成制造系统, 2009, 15(3) |
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| 作者姓名： | 潘春荣 伍乃骐 |
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| 作者单位： | 广东工业大学,机电工程学院,广东,广州,510006;汕头大学工学院,广东,汕头,515063;广东工业大学,机电工程学院,广东,广州,510006 |
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| 基金项目： | 国家自然科学基金，广东省科技计划项目 |
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| 摘 要： | 晶圆制造的加工工艺日趋复杂,存在严格的逗留时间约束,无法解决自动化组合设备的调度问题,尤其对于重人加工、作业时间的随机波动及多自动化组合设备等复杂的加工过程更是如此.通过分析晶圆制造自动化组合设备调度的难点和局限性以及现有的调度方法及其局限性,提出了"仿真+启发式+优化"的方法,可能是有效解决组合设备调度问题的途径.
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| 关 键 词： | 自动化组合设备 晶圆制造 调度 Petri网 建模 |
Scheduling of cluster tools in wafer fabrication |
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| PAN Chun-rong,WU Nai-qi. Scheduling of cluster tools in wafer fabrication[J]. Computer Integrated Manufacturing Systems, 2009, 15(3) |
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| Authors: | PAN Chun-rong WU Nai-qi |
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| Affiliation: | 1.School of Mechanical & Electronic Engineering;Guangdong University of Technology;Guangzhou 510006;China;2.College of Engineering;Shantou University;Shantou 515063;China |
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| Abstract: | With strict residency time constraint,processes of wafer fabrication in cluster tools has become increasingly complicated.It was difficult to schedule automated cluster tools,especially multi cluster tools with complex processes such as re-enter processes and stochastic variation of working time.By analyzing difficulty and limitations of the existing scheduling methods for cluster tools in semiconductor fabrication,"simulation+heuristic+optimization" strategy was proposed which would be an effective solutio... |
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| Keywords: | cluster tools wafer fabrication scheduling Petri net modeling |
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