MEMS微结构变形行为尺度效应的研究进展

微米尺寸驱动结构广泛应用于微机电系统（MEMS）和集成电路等微／纳米系统中。由于这些微米尺寸驱动结构的几何尺寸和其微结构尺寸均在微米至纳米范围，它们的弹性、塑性性能及其变形行为具有明显的尺度效应。简要概述了近年来国内外有关微米尺寸驱动结构的弹性性能和变形特性尺度效应的研究情况，介绍了高阶理论的发展和塑性应变理论与微极理论在尺度效应分析中的应用，并对MEMS今后需要重点研究的方向进行了展望。

Progress of size effect of deformational behaviors of small dimensional structures in MEMS

Small dimensional structures are widely used in MEMS and micro/nano-systems. Since the geometric and microstructural dimensions of the structures are ranged from microns to nanometers, the size dependence of effective elastic properties and plastic behaviour is more pronounced when the microstructures' size approaches to the characteristic length of matrix material. The effects of microstructures' size on the elasticity of the microstructures and deformational behaviors are reviewed. The development of high-order theory is introduced and the prospective research directions of the size effect of microstructures in the future are forecasted.