| 一种压阻式压力传感器误差修正的软件方法 |
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| 引用本文： | 谢聂,朱家海.一种压阻式压力传感器误差修正的软件方法[J].传感器与微系统,2003,22(3):57-59. |
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| 作者姓名： | 谢聂 朱家海 |
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| 作者单位： | 空军工程大学,工程学院,自动控制系,陕西,西安,710038 |
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| 摘 要： | 针对硅压阻式压力传感器的误差特性,设计了一种对其非线性及温度变化所引起的误差进行补偿的软件算法。该算法根据实验确定的修正系数,直接由微处理器对传感器信号进行数字化的修正,已在一定的温度和压力范围内实现0.1%的测量精度,可直接应用于硅压阻式压力传感器的设计。
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| 关 键 词： | 硅压阻式压力传感器 误差修正 软件算法 |
| 文章编号： | 1000-9787(2003)03-0057-03 |
| 修稿时间： | 2002年9月27日 |
An error correction method for piezoresistive pressure transducer by software |
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| Abstract: | ?A arithmetic is designed to compensate the offset and sensitivity and associated temperature coefficients of piezoresistive pressure sensors according to their characteristics.With this method,the signal of transducer is digitally corrected by microprocessor based on the calibration and compensation coefficients determined from transducer pretest data, the measure accuracy of 0.1% is reached over the specified temperature and pressure range.It can be used to design smart piezoresistive pressure transducers readily. |
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| Keywords: | silicon piezoresistive pressure transducer error correction software arithmetic |
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