A new 200 kV Ω-filter electron microscope |
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| Authors: | TANAKA,TSUDA,TERAUCHI,TSUNO,KANEYAMA,HONDA,& ISHIDA |
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| Affiliation: | Research Institute for Scientific Measurements, Tohoku University, Sendai 980-8577, Japan,;JEOL Ltd, 1–2, Musashino 3-chome, Tokyo 196-8558, Japan |
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| Abstract: | A new 200 kV Ω-filter electron microscope was developed under a project supported by a Grant-in-Aid for Specially Promoted Research of the Ministry of Education, Science, Sports and Culture of Japan. The performance of the microscope is described. |
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| Keywords: | CBED electron microscope omega filter structure refinement |
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