| 介质型膜密集波分复用滤光片膜厚监控的研究 |
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| 引用本文： | 周保青,黄光周,于继荣,常天海. 介质型膜密集波分复用滤光片膜厚监控的研究[J]. 真空电子技术, 2002, 0(2): 5-7 |
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| 作者姓名： | 周保青 黄光周 于继荣 常天海 |
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| 作者单位： | 华南理工大学,电子与通信工程系,广东,广州,510641 |
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| 基金项目： | 广东省重点科技攻关课题(2KB02402G) |
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| 摘 要： | 高精度高性能的光学薄膜厚膜厚监控系统是制备密集波分复用滤光片的关键，本文提出了一种非1/4波长膜系监控膜厚的方法，该方法所采用的系统具有稳定性好、波长分辩率高等优点。
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| 关 键 词： | 膜厚监控 密集波分复用滤光片 介质膜 |
| 文章编号： | 1002-8935(2002)02-0005-03 |
| 修稿时间： | 2001-12-10 |
Study on the Method to Monitor the Optical Thickness of DTF Typed DWDM Filter |
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| ZHOU Bao-qing,HUANG Guang-zhou,YU Ji-rong,CHANG Tian-hai. Study on the Method to Monitor the Optical Thickness of DTF Typed DWDM Filter[J]. Vacuum Electronics, 2002, 0(2): 5-7 |
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| Authors: | ZHOU Bao-qing HUANG Guang-zhou YU Ji-rong CHANG Tian-hai |
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| Abstract: | High precision and high performance optical thickness monitor is a key component to monitoring the optical thickness when deposing the DWDM filter. A film thickness control method for non-quarter wavelength film is presented in this paper. This optical thickness monitor has advantage of high stability and high resolution. |
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| Keywords: | Optical thickness monitor DWDM filter Dielectric thin film |
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