| Al合金布线材料Fe掺杂最佳含量的理论分析 |
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| 引用本文： | 陈玖琳,潘良玉,樊世杰,范志新.Al合金布线材料Fe掺杂最佳含量的理论分析[J].光电子技术,2002,22(3):168-170. |
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| 作者姓名： | 陈玖琳 潘良玉 樊世杰 范志新 |
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| 作者单位： | 河北工业大学应用物理系,天津,300130 |
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| 摘 要： | 介绍一个最佳掺杂含量表达式，应用此表达式分析计算了Al-Fe合金布线材料Fe掺杂最佳含量，定量计算的结果与实验数据基本符合。
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| 关 键 词： | Al－Fe合金薄膜 晶体结构 制备方法 最佳掺杂含量 理论计算 |
| 文章编号： | 1005-488X(2002)03-0168-03 |
| 修稿时间： | 2002年5月20日 |
The Theoretical Calculation of Optimum Doping Content for Al-Fe Alloy Films |
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| Chen Jiulin,Pan Liangyu,Fan Shijie,Fan Zhixin.The Theoretical Calculation of Optimum Doping Content for Al-Fe Alloy Films[J].Optoelectronic Technology,2002,22(3):168-170. |
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| Authors: | Chen Jiulin Pan Liangyu Fan Shijie Fan Zhixin |
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| Abstract: | Analysis of experimental Al-Fe alloy films with various doping levels is presented. The relationship among the physical property, crystal structure, preparation method and doping content is established to be a parabola equation. The extreme value of this equation determined the optimum doping content. The optimum doping content of Al-Fe alloy films determined by this quantitative calculation value is consistent with the experimental results. The theoretical quantitative calculation value of optimum doping content is within 1. 72%(at)-1. 82%(at), and the experimental results is 2at%. This theoretical expression is also appropriate to resolve the optimum doping content for other electric materials. |
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| Keywords: | Al-Fe alloy films crystal structure preparation method optimum doping content theoretical calculation |
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