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| An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides | |
| 作者姓名： | Fang Qing He Yuejiao Xin Hongli Li Fang and Liu Yuliang |
| 作者单位： | 中国科学研究院半导体研究所 北京100083 (方青，贺月娇，辛红丽，李芳)，中国科学研究院半导体研究所 北京100083(刘育梁) |
| 摘 要： | A 1×8 multimode interference power splitter with multimode input/output waveguides in SOI material is designed by the beam propagation method and fabricated by the inductive coupled plasma etching technology for use in fiber optics communication systems.The fabricated device exhibits low loss and good coupling uniformity.The excess loss is lower than 0.8dB,and the uniformity is 0.45dB at the wavelength of 1550nm.Moreover，the polarization dependent loss is lower than 0.7dB at 1550nm.The device size is only 2mm×10mm. |
| 关 键 词： | 多模干涉 功率分束器 SOI 多模输入/输出波导 multimode interference power splitter SOI multimode input/output waveguides 多模输入 输出波导 干涉型 分束器 Input Multimode Splitter Efficient Waveguides size polarization dependent excess loss lower device low loss good coupling uniformity output |
An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides |
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| Fang Qing,He Yuejiao,Xin Hongli,Li Fang,and Liu Yuliang.An Efficient MMI SOI Splitter with Multimode Input/Output Waveguides[J].Chinese Journal of Semiconductors,2005,26(2):276-280. | |
| Authors: | Fang Qing He Yuejiao Xin Hongli Li Fang Liu Yuliang |
| Abstract: | |
| Keywords: | multimode interference power splitter SOI multimode input/output waveguides |
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