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非蒸散型吸气剂对混合气体的抽气行为研究
引用本文:陈丽萍,蒋迪奎. 非蒸散型吸气剂对混合气体的抽气行为研究[J]. 真空科学与技术学报, 2004, 24(3): 225-229
作者姓名:陈丽萍  蒋迪奎
作者单位:上海原子核研究所,上海,201800
摘    要:NEG抽除混合气体的行为不同于抽单纯气体.测试了SEAS公司的NEG组件ST707WP 1250对由80%H2和20%CO组成的混合气体的抽气性能,并和抽纯气性能进行了比较.混合气体中的NEG对H2的抽速受CO影响,随H2吸气量的增加而明显下降.混合气体中的NEG对CO的抽速不受H2影响.研究结果为SSRF储存环真空系统设计提供了重要依据.

关 键 词:混合气体  抽气性能
文章编号:1672-7126(2004)03-0225-05
修稿时间:2003-09-15

Pumping Characteristics of Mixed Gases with Non-Evaporation Getter
Chen Liping and Jiang Dikui. Pumping Characteristics of Mixed Gases with Non-Evaporation Getter[J]. JOurnal of Vacuum Science and Technology, 2004, 24(3): 225-229
Authors:Chen Liping and Jiang Dikui
Abstract:Mixed gaseous (80% H 2 and 20% CO) were pumped by activating a non evaporation getter (NEG) to see how different it behaves when used to pump a pure gas.We found that NEG significantly reduces the pumping speed of H 2 with an increase of H 2 absorption,whereas it little affects the pumping speed of CO.Our finding is of some technical interest in designing the vacuum system of the storage ring in Shanghai Synchrotron Radiation Facility (SSRF).
Keywords:NEG
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