Low-temperature solution processing route for potassium sodium niobate (KNN) thin films |
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| Affiliation: | 1. Department of Materials and Ceramic Engineering, CICECO – Aveiro Institute of Materials, Campus de Santiago, University of Aveiro, 3810-193, Portugal;2. Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Científicas (ICMM-CSIC), Calle Sor Juana Inés de la Cruz, 3, Cantoblanco, 28049 Madrid, Spain;3. Centre for Mechanical Technology & Automation, Department of Mechanical Engineering, Campus de Santiago, University of Aveiro, 3810-193 Aveiro, Portugal;1. Institute of Physics of the Czech Academy of Sciences, Prague, Czechia;2. Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Czechia;3. Department of Materials and Ceramic Engineering, CICECO–Aveiro Institute of Materials, University of Aveiro, 3810-193 Aveiro, Portugal;1. College of Material Science and Engineering, Sichuan University, Chengdu 610065, China;2. Department of Chemistry and 4D LABS, Simon Fraser University, Burnaby, British Columbia V5A1S6, Canada;3. School of Material Science and Engineering, Shaanxi University of Science and Technology, Xi’an 710021, China;4. Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research, School of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China;1. Department of Inorganic Chemistry, Faculty of Science, Charles University, Hlavova 2030/8, 128 43 Prague, Czech Republic;2. Department of Industrial Engineering, University of Trento, via Sommarive 9, 38123 Trento, Italy;3. CICECO-Aveiro Institute of Materials, Department of Materials and Ceramic Engineering, University of Aveiro, 3810-193 Aveiro, Portugal;4. INSTM, National Interuniversity Consortium of Materials Science and Technology, via G. Giusti 9, 50121 Florence, Italy;1. Department of Materials and Ceramic Engineering, CICECO – Aveiro Institute of Materials, University of Aveiro, Campus Santiago, 3810-193 Aveiro, Portugal;2. Technological Centre of Ceramic and Glass - CTCV, 3040-540 Antanhol, Coimbra, Portugal;3. Revigres, Lda., 3754-001 Águeda, Portugal |
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| Abstract: | A major challenge for integration of functional oxides, such as ferroelectrics, into microelectronics and flexible electronics is the reduction of their processing temperature, which needs to be lower than the degradation temperature of silicon and flexible plastic substrates. Aiming that, attention has been given to low-temperature processing of oxide films by chemical solution deposition (CSD). In the field of ferroelectrics, potassium sodium niobate ((K1−xNax)NbO3, KNN) has aroused a special interest due to its eco-friendliness, despite the high crystallization temperature. In this work, polycrystalline KNN thin films have been fabricated for the first time at a temperature as low as 400 °C using a modified CSD process, the Seeded Photosensitive Precursor Method (SPPM). Despite this low processing temperature, monophasic and stoichiometric films with appreciable values of remnant polarization, Pr ∼ 10.8 μC/cm2, and hysteretic piezoresponse are obtained. These results open a window to the direct integration of KNN films into the high-performance electronic devices. |
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| Keywords: | Alternative processing Chemical solution deposition Lead-free ferroelectrics KNN" },{" #name" :" keyword" ," $" :{" id" :" key0025" }," $$" :[{" #name" :" text" ," $$" :[{" #name" :" __text__" ," _" :" Potassium sodium niobate, (K" },{" #name" :" inf" ," $" :{" loc" :" post" }," _" :" 1-x" },{" #name" :" __text__" ," _" :" Na" },{" #name" :" inf" ," $" :{" loc" :" post" }," _" :" x" },{" #name" :" __text__" ," _" :" )NbO" },{" #name" :" inf" ," $" :{" loc" :" post" }," _" :" 3 SPPM" },{" #name" :" keyword" ," $" :{" id" :" key0035" }," $$" :[{" #name" :" text" ," _" :" Seeded Photosensitive Precursor Method |
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