长度光栅测量系统的误差修正技术

文章针对长度光栅测量系统的误差来源、特点提出了二次比对、拟合的修正方法。在文章所论述的方法中,通过光电显微镜、线纹尺、数据拟合工具将光栅位移长度溯源到激光波长;将生成的修正公式赋进长度光栅测量系统的程序中完成误差自动修正。文章提出的光栅测长系统的误差修正方法原理简单、实用、修正精度高。对于三坐标测量机、测长机、万工显等精密直线位移平台都具有借鉴和参考价值。

Error Correction Technology of Length Grating Measuring System

According to Source and feature of error for length grating measuring system,correction methods of comparison and fitting are discussed.In mentioned method,displacement length of grating was traced back to laser wavelength via photoelectronic microscope,line scale and data fitting tool.The correction method is designated to program of length grating measuring system to achieve automatic correction of error.The correction method is simple in principle and practical,and correction accuracy is high.For three-coordinate measaring machine,length measuring machine,a variety of precision linear displacement platforms,the method has important reference and consultation value.