| 基于互相关分析的激光自准直小角度测量技术 |
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| 引用本文： | 黄银国,林玉池,王为,赵美蓉.基于互相关分析的激光自准直小角度测量技术[J].纳米技术与精密工程,2010,8(2):120-125. |
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| 作者姓名： | 黄银国 林玉池 王为 赵美蓉 |
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| 作者单位： | 天津大学精密测试技术及仪器国家重点实验室,天津,300072 |
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| 基金项目： | 国家自然科学基金资助项目(60874106) |
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| 摘 要： | 应用光学自准直原理,选用激光二极管（LD）为光源,位置敏感探测器（PSD）为光电探测器,构建了一种基于互相关分析的激光自准直小角度测量系统.为了提高小角度测量精度,该系统对光源进行正弦调制,利用互相关分析解调出待测小角度信息.根据互相关分析理论,设计了信号处理系统,对影响系统精度的主要因素进行了分析.实现了测量样机,并进行了性能测试实验.实验表明,互相关解调系统有效地抑制了噪声的影响,样机具有较高的二维小角度测量精度和示值稳定性,在±150″范围内,最大非线性误差为0.6″,重复性误差为0.2″,漂移为0.4″/4h.
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| 关 键 词： | 互相关分析 小角度测量 激光自准直 调制 |
Laser Autocollimation Measurement of Small AngleBased on Cross Correlation |
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| HUANG Yin-guo,LIN Yu-chi,WANG Wei,ZHAO Mei-rong.Laser Autocollimation Measurement of Small AngleBased on Cross Correlation[J].Nanotechnology and Precision Engineering,2010,8(2):120-125. |
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| Authors: | HUANG Yin-guo LIN Yu-chi WANG Wei ZHAO Mei-rong |
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| Affiliation: | State Key Laboratory of Precision Measuring Technology and Instruments/a>;Tianjin University/a>;Tianjin 300072/a>;China |
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| Abstract: | A laser autocollimation measurement system based on optical autocollimation principle was put forward for small angle measurement,using laser diode(LD)as light source and position sensitive detector(PSD)as a laser spot detector.In order to improve the precision,the small angle measurement system adopted cross correlation analysis to modulate LD with sine-wave.Through cross correlation demodulation,the small angle to be measured was then extracted from the output of PSD.The signal processing system for small... |
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| Keywords: | cross correlation small angle measurement laser autocollimation modulation |
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