| 微波离子源聚焦离子束光学系统的研究 |
| |
| 引用本文： | 施立群,彭士香,冯慧云,陈斌,胡纯栋,王邵虎,余增亮.微波离子源聚焦离子束光学系统的研究[J].核技术,1999,22(1):17-23. |
| |
| 作者姓名： | 施立群 彭士香 冯慧云 陈斌 胡纯栋 王邵虎 余增亮 |
| |
| 作者单位： | 1. 复旦大学现代物理研究所
2. 中国科学院等离子体物理研究所,合肥,230031 |
| |
| 基金项目： | 国家“八五”重点科技攻关项目 |
| |
| 摘 要： | 设计了一种微波离子源的聚焦离子束光学系统，分析计算了光学系统的束径。并数值模拟了由空间电荷作用造成的束径增宽效应，找出了影响束斑大小的主要因素和减小束径的方法。测试结果表明，在束能在２５ｋｅＶ时，束流为１４８ｎＡ，束径约为２０μｍ左右。
|
| 关 键 词： | 聚焦离子束 微波离子源 束径 |
Study of focused ion beam column with microwave ion source |
| |
| SHI Liqun,PENG Shixiang,FENG Huiyun,CHEN Bin,HU Chundong,WANG Shaohu,YU Zengliang.Study of focused ion beam column with microwave ion source[J].Nuclear Techniques,1999,22(1):17-23. |
| |
| Authors: | SHI Liqun PENG Shixiang FENG Huiyun CHEN Bin HU Chundong WANG Shaohu YU Zengliang |
| |
| Abstract: | A focused ion beam optical column with microwave ion source used formicrofabrication of cells is described in this paper. Both analytic calculation of beamdiameter in the column and numerical simulation of space- charge-induced beambroadening were made, and main factors influencing beam size and methods ofreducing the beam spot were found. By this system, a 25keV N+ beam of about 20 mdiameter with 148nA current was finally achieved when the aperture diameter was0. 1mm. |
| |
| Keywords: | Focused ion beam Microwave ion source Beam size |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
