| 微显示器和晶圆技术的现状及展望 |
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| 引用本文： | 黄河,蒲贤勇,唐德明.微显示器和晶圆技术的现状及展望[J].现代显示,2005,263(10):10-18. |
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| 作者姓名： | 黄河 蒲贤勇 唐德明 |
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| 作者单位： | 中芯国际集成电路制造有限公司,上海,201203 |
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| 摘 要： | 介绍LCD、DMD和LCOS三大主流微显示器的构造、制作和基于微显示技术的投影显示基本原理,并展望其发展趋势及中芯国际的LCOS开发成果.
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| 关 键 词： | 微显示器 晶圆制造技术 投影显示 |
| 文章编号： | 1006-6268（2005）10-0010-09 |
| 收稿时间： | 2005-08-16 |
| 修稿时间： | 2005年8月16日 |
Status and Prospectus of Silicon-Based Microdisplay and Wafer Process Technology |
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| HUANG He,PU Xian-yong,TANG De-ming.Status and Prospectus of Silicon-Based Microdisplay and Wafer Process Technology[J].Advanced Display,2005,263(10):10-18. |
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| Authors: | HUANG He PU Xian-yong TANG De-ming |
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| Abstract: | Introduction is provided to the microstructure of the three main-stream microdisplay device technologies, LCD, DMD and LCOS, and the electrical-optical operating principles of these micro device operation for projection display, A prospective analysis is also presented on their future development besides the status report on the LCOS backplane wafer process technology development at SMIC. |
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| Keywords: | microdisplay silicon wafer manufacturing technology projection display |
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