High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension |
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Authors: | Felix Greiner Helmut F Schlaak |
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Affiliation: | 1. Microtechnology and Electromechanical Systems Laboratory (M+EMS), Institute of Electromechanical Design, Technische Universit?t Darmstadt, Darmstadt, Germany
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Abstract: | Vertical nano and micro pillars perpendicularly rising from a substrate offer two lateral translatory–rotatory degrees of freedom. Electroforming allows their production as small footprint integrated suspension elements of micro to nano scale. This paper demonstrates the design of a novel inertial sensor concept with acceleration sensor and gyroscope function using only one inertial mass. Experimental results using UV Direct LIGA with AZ 125 nXT show the feasibility of a technology demonstrator with a copper micro pillar of 400 μm length and 40 μm diameter. Further work using x-ray Direct LIGA is scheduled for the production of the pillar with a length of 100 μm and a diameter of 3–6 μm. Fabrication concepts and pilot tests show promising possibilities for miniaturization towards nano scale pillars for minimal footprint suspension in MEMS. |
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