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Fabrication of Multilayer Borophene on Insulator Structure |
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| Authors: | Hsu‐Sheng Tsai Ching‐Hung Hsiao Yu‐Pin Lin Chia‐Wei Chen Hao Ouyang Jenq‐Horng Liang |
| Affiliation: | 1. Institute of Nuclear Engineering and Science, National Tsing Hua University, Hsinchu, Taiwan, R. O. C.;2. Department of Material Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, R. O. C.;3. Department of Material Science and Engineering, National Chiao Tung University, Hsinchu, Taiwan, R. O. C.;4. Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan, R. O. C. |
| Abstract: | |
| Keywords: | borophene ion implantation plasma |