基于微机电系统的数字检波器研制和性能分析

对微机电系统（MEMS）数字检波器的结构和性能进行了简要介绍，对MEMS数字检波器的室内检测系统的组成、标定和测量方法等方面进行了描述。在江苏油田进行了MEMS数字检波器野外试验，以测试MEMS传感器的性能。试验结果表明，用MEMS数字检波器采集的资料，浅层的信噪比、分辨率和波组特征比传统检波器的要好，深层能量较弱；在室内进行了三分量MEMS数字检波器和超级检波器的对比试验，结果表明，数字检波器的频率响应要优于超级检波器，阻尼低于超级检波器；在四川达州进行的三分量MEMS数字检波器野外试验表明，三分量MEMS数字检波器的灵敏度较低，不能分辨深层弱信号；在山东煤田的试验中，三分量MEMS数字检波器的灵敏度提高了3倍，记录的总体面貌没有很大改观，但检波器对小于10Hz的面波信号有响应。

Development of MEMS-based digital geophone and analysis of its performance

Digital geophones with domestically made MEMS acceleration sensor were tested and compared with conventional geophones in field operation. Methods for testing and analyzing the behaviors of MEMS geophones are developed.The performance differences between domestic MEMS geophones and conventional ones as well as field test and real data processing are studied, it is shown that domestic MEMS geophones are superior to conventional ones in frequency response,especially for signals with frequency of less that 10 Hz. Its cross axis isolation is higher than that of conventional geophone by one order of the magnitude. Suggestions for the improvement of domestic MEMS accelerometers are presented based on the analysis performed on the data from the field test.