多弧离子镀TiN涂层工艺及相结构

探讨了多弧离子镀技术中预轰击时间、氮分压和靶电流等对高速钢ＴｉＮ涂层的影响。结果表明，在不同的工艺条件下，ＴｉＮ涂层的相结构组成基本相同，但相对量不一样。当氮分压降低时或当预轰击时间延长时，涂层的硬度增大，耐磨性能改善。当靶电流减小时，涂层的硬度和耐磨性能降低。

Multi arc Techniques of TiN Coatings and Phase Structure

The main deposition parameters of multi arc TiN coating techniques include prebombarding time,N 2 partial pressure and target current,their influences on the coating phase structure,adhesive,microhardness and wear resistance are investigated by SEM,XRD,adhesive scratch tester and others.The results show that the microstructure of coatings is essentially the same,but the relative quantities are different.The experimental techniques show that if the N 2 partial pressure is lower or the pre bombarding time is prolonged,the hardness of coatings is increased and if the target current is smaller,the hardness of coatings is decreased.