超精密机床在线测量系统及其快速数据采集系统的硬件设计与研究

超精密机床是实现超精密加工的必要条件,它的研制成功对微电子、国防等尖端技术具有十分重要的意义。本文研究了超精密机床的关键部分——激光在线测量系统,并对其快速数据采集系统的硬件设计进行了深入的探讨,为超精密机床的研制奠定了基础。

Research and Design on In-process Measuring System of Utraprecision Turning Machines and Hardware of Rapid Data Collection

Utraprecision turing machine is a necessary condition of realizingutraprecision machining, its development is very important for the most advanced technology such as electronics, national defense industry. In this paper, the key part of utraprecision turningmachine--in-process laser measuring system, and the design on hardware of rapid datacollection are studied. It supplies basis for the development of utraprecision turning machine.