| 面向膜电极的选择性生成纳米级多孔硅技术的研究 |
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| 引用本文： | 王温静,王晓红,姜英琪,胡小龙,刘理天.面向膜电极的选择性生成纳米级多孔硅技术的研究[J].传感技术学报,2006,19(5):1477-1480. |
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| 作者姓名： | 王温静 王晓红 姜英琪 胡小龙 刘理天 |
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| 作者单位： | 清华大学,微电子学研究所,北京,100084;清华大学,微电子学研究所,北京,100084;清华大学,微电子学研究所,北京,100084;清华大学,微电子学研究所,北京,100084;清华大学,微电子学研究所,北京,100084 |
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| 摘 要： | 研究了面向微型燃料电池膜电极的多孔硅薄膜的制备工艺.多孔硅刻蚀工艺高效便宜,与标准CMOS工艺兼容.通过选择不同的衬底掺杂浓度和适当的电解液浓度能控制纳米(或微米)级多孔硅的孔径大小,得到适用于膜电极的纳米级孔径的多孔硅薄膜,证实了纳米级多孔硅可用于硅微燃料电池中膜电极的可能性.
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| 关 键 词： | 多孔硅 微型燃料电池 膜电极 |
| 文章编号： | 1004-1699(2006)05-1477-04 |
| 修稿时间： | 2006年7月1日 |
Investigation of Selectively Forming Nano-Porous Silicon for the application of MEA |
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| WANG Wen-jing,WANG Xiao-hong,JIANG Yin-qi,HU Xiao-long,LIU Li-tian.Investigation of Selectively Forming Nano-Porous Silicon for the application of MEA[J].Journal of Transduction Technology,2006,19(5):1477-1480. |
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| Authors: | WANG Wen-jing WANG Xiao-hong JIANG Yin-qi HU Xiao-long LIU Li-tian |
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| Affiliation: | Institute of Microelectronics, Tsinghua University, Beijing, 100084 |
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| Abstract: | Study of the formation of porous silicon is performed. The porous wafers are produced by deep anodic etching which is a very effective and cheap fabrication method compatible to standard Si CMOS fabrication technology. The density of nano- (and micro-) pores can be varied in a wide range by choice of substrate doping level and appropriate electrolyte solution. Therefore the nano-porous silicon membrane is obtained, demonstrating the possibility of the use of nano-porous silicon as a proton electrolytic membrane (PEM) material for micro-fuel cell applications. |
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| Keywords: | porous silicon micro fuel cell MEA |
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