Low-pressure pyrolysis studies of a new phosphorus precursor: Tertiarybutylbis(dimethylamino)phosphine |
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| Authors: | C. W. Hill R. W. Gedridge T. J. Groshens G. B. Stringfellow L. P. Sad Wick |
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| Affiliation: | (1) Departments of Materials Science and Engineering and Electrical Engineering, University of Utah, 84112 Salt Lake City, UT;(2) Research and Technology Division, Naval Air Warfare Center Weapons Division, Chemistry and Materials Branch (Code 474220D), 93555 China Lake, CA |
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| Abstract: | The low pressure decomposition of tertiarybutylbis(dimethylamino) phosphine, (t-Bu)P(NMe2)2, (TBBDMAP), has been studied on quartz and deposited GaP and InP surfaces. This new phosphorus precursor has been found to pyrolyze on quartz surfaces at much lower temperatures than the related compounds tertiarybutylphosphine, (t-Bu)PH2, (TBP) and tris(dimethylamino)phosphorus, P(NMe2)3, (TDMAP). In contrast to the results obtained for TDMAP, GaP and InP surfaces decrease the decomposition temperature of TBBDMAP only slightly. The TBBDMAP reaction products were dimethylamine, methylmethyleneimine, and isobutylene, consistent with previous pyrolysis studies of TBP and TDMAP. |
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| Keywords: | Phosphorous precursor pyrolysis studies tertiarybutylbis(dimethylamino) phosphine |
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