考虑模态分析的超高加速度宏微运动平台导轨架优化设计

超高加速度宏微运动平台具有定位精度高、误差小等优点，基于模态分析对超高加速度宏微运动平台的关键机构导轨架进行优化设计，以实现平台的性能优化。采用 SolidWorks 软件搭建导轨架模型，通过ANSYS Workbench软件进行模态分析、拓扑优化和响应面优化等，在保持1阶固有频率稳定的前提下尽可能降低导轨架的质量。结果表明：响应面的优化符合预期目标，导轨架的1阶固有频率增加了0.7%，质量从6.165 kg减小到5.592 kg，变化率为9.2%，达到了轻量化的目的。

Optimal Design of Guide Rail Frame for Ultra-High Acceleration Macro-Micro Motion Platform Considering Modal Analysis

The ultra-high acceleration macro-micro motion platform has the advantages of high positioning accuracy and small error. Based on the modal analysis,the guide rail frame of the key mechanism of the ultra-high acceleration macro-micro motion platform was optimized to optimize the performance of the platform.SolidWorks software was used to build the guide rail frame model,modal analysis,topology optimization and response surface optimization were performed by ANSYS Workbench software,to reduce the quality of the guide rail frame as much as possible while maintaining the stability of the first-order natural frequency.The results show that the response surface optimization is line with the expected target,the first-order natural frequency of the guide rail frame increases by 0.7%,the mass decreases from 6.165 kg to 5.592 kg,and the change rate is 9.2%,which achieves the purpose of light weight.