| 对计量型原子力显微镜纳米测量系统的比对验证 |
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| 引用本文： | 杜华,高思田,金其海,朱小平.对计量型原子力显微镜纳米测量系统的比对验证[J].现代测量与实验室管理,2005,13(6):6-9. |
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| 作者姓名： | 杜华 高思田 金其海 朱小平 |
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| 作者单位： | 中国计量科学研究院,北京,100013 |
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| 摘 要： | 原子力显微镜是广泛应用的纳米测量仪器。中国计量科学研究院成功研制了计量型原子力显微镜纳米测量系统，本文介绍了该系统的技术特点和指标，并通过与发达国家的比对测试验证了该系统在测量原理、测量精度及可溯源性方面已达到了国际先进水平。
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| 关 键 词： | 纳米技术 溯源 计量型原子力显微镜纳米测量系统 比对验证 |
| 文章编号： | 1005-3387（2005）06-00136-09 |
Validation to Metrological Atomic Force Microscope Measuring Syetem by Comparison with PTB |
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| DU Hua,GAO Sitian,JIN Qihai,ZHU Xiaoping.Validation to Metrological Atomic Force Microscope Measuring Syetem by Comparison with PTB[J].Advanced Measurement and Laboratory Management,2005,13(6):6-9. |
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| Authors: | DU Hua GAO Sitian JIN Qihai ZHU Xiaoping |
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| Affiliation: | National Institute of Metrology, Beijing 100013 |
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| Abstract: | The AFM is one of important and useful nanomeasuring instruments, we have developed the metrological AFM of nanomeasuring system at NIM. This paper described the metrological characteristics and targets of the system, the measuring principle,accuracy,traceability of the system have been proved by comparison with PTB, that they have been achieved the advanced international level. |
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| Keywords: | nanometrology traceability metrological AFM of nanomeasuring system comparison |
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