Reflectance spectra of extreme ultraviolet mirrors for synchrotron radiation

Reflectance spectra have been measured for many materials in the wavelength range from 90 Å to 400 Å. The angle of incidence ranged from 20° to 85°. The samples were chemical-vapor-deposited silicon carbide (CVD-SiC), a single crystal of silicon with (100) surface, fused quartz, zerodur, pyrex, gold, platinum, copper and two kinds of steel. To obtain reflectances for surfaces for practical use, measurements were made on surfaces sufficiently exposed to air. Reflectances for s-polarized light (R_s) were measured for all samples. On CVD-SiC, gold and platinum, reflectances for p-polarized light (R_P) were also observed. At short wavelengths and large angles of incidence, the difference between R_s and R_P is small, and R_P happened to exceed R_s in contrast to the result from the Fresnel equation. This may be due to the deviation of the present surfaces of mirrors from an ideal plane. Reflectance spectra of surfaces prepared by some feasible techniques are also presented.