| ECR-CVD制备类金刚石碳膜的正交实验法研究 |
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| 引用本文： | 谷坤明,王超,毛斐,虞烈,汤皎宁.ECR-CVD制备类金刚石碳膜的正交实验法研究[J].润滑与密封,2011,36(3). |
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| 作者姓名： | 谷坤明 王超 毛斐 虞烈 汤皎宁 |
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| 作者单位： | 1. 深圳大学材料学院深圳市特种功能材料重点实验室,广东深圳,518060
2. 西安交通大学机械学院,陕西西安,710049 |
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| 基金项目： | 国家高技术研究发展计划项目，广东省科技计划项目，深圳市科技计划项目 |
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| 摘 要： | 采用系统的正交实验法对ECR-CVD法沉积类金刚石碳膜(DLC)的优化工艺进行研究,并分析不同工艺参数对DLC膜性能的影响.共选择基片温度、H2流量、微波功率、直流偏压、脉冲偏压以及脉冲偏压占空比6个参数建立起6因素5水平的正交表,分别以薄膜摩擦因数、磨损率、显微硬度、拉曼谱中D峰与G峰的面积比ID/IG作为考察对象进行研究.极差分析表明,对不同的考察因素其优化工艺略有区别.在所选的参数范围内,脉冲偏压对所测量的DLC膜的性能影响最大.
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| 关 键 词： | 气相沉积 类金刚石碳膜 正交实验 摩擦磨损性能 |
Systematic Orthogonal Experiments Investigation for Diamond-like Carbon Deposition by ECR-CVD Method |
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| Gu Kunming,Wang Chao,Mao Fei,Yu Lie,Tang Jiaoning.Systematic Orthogonal Experiments Investigation for Diamond-like Carbon Deposition by ECR-CVD Method[J].Lubrication Engineering,2011,36(3). |
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| Authors: | Gu Kunming Wang Chao Mao Fei Yu Lie Tang Jiaoning |
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| Affiliation: | Gu Kunming1 Wang Chao1 Mao Fei1 Yu Lie2 Tang Jiaoning1 (1.Shenzhen Key Laboratory of Special Functional Materials,Materials School of Shenzhen University,Shenzhen Guangdong 518060,China,2.Mechanical College of Xi'an Jiaotong University,Xi'an Shaanxi 710049,China) |
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| Abstract: | Systematic orthogonal experiments were performed in order to obtain the optimized parameters for diamond-like carbon(DLC) film deposition using ECR-CVD method and to find the influence degree of technological parameters on the properties of DLC film.Substrate temperature,H2 flow rate,microwave power,DC bias,pulse bias and duty factor of pulse bias were chosen as parameters for a six-factor-five-level orthogonal table and mechanical properties of DLC film such as friction coefficient,wear rate,micro-hardness... |
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| Keywords: | vapor deposition diamond-like carbon films orthogonal experiment friction and wear behavior |
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