基于eM-Plant的虚拟晶圆制造自动组合装置

针对难以用解析法验证半导体加工装置的调度可行性问题，提出仿真建模研究的新方法。利用仿真软件eM-Plant建立晶圆制造中单臂自动组合装置的参数化仿真模型，构建一个虚拟的晶圆制造系统。该系统为研究自动组合装置控制问题提供有效手段，是验证半导体制造生产调度可行性的仿真平台。

Virtual Cluster Tool in Wafer Fabrication Based on eM-Plant

With wafer residency time constraints in cluster tools for semiconductor fabrication,feasibility of schedule and control can not be checked analytically.A new method based on simulation is presented,and a virtual single-arm cluster tool for controller testing is developed by using eM-Plant.It is a parameterized model which provides an effective tool for researchers to study the control problem of cluster tools,and for engineers to check feasibility of a schedule for them.