用于微流控芯片的PDMS微混合器工艺和数值分析

介绍了一种用软光刻技术制作微流芯片上PDMS微混合器的工艺。首先用SU-8胶制作微模具,然后用复制压模法制作出PDMS微通道,最后用紫外光表面改性实现PDMS材料和玻璃基片的键合。阐述了微混合的机理,用数值分析方法对三种形状微混合器进行了液体混合效率的分析,结果表明,弯形管道特别是Z形管道,由于惯性力在横截面上产生的二次流动能有效增大液体间的微混合面积,因而大大提高了液体混合的效率。

Fabrication and Numerical Analysis of PDMS Micromixer on Microfluidic Chip

A process of soft lithography was introduced for fabrication of PDMS(polydimethylsiloxane) micro-mixer on micro-fluidic chip.During fabrication process,the micro-model was firstly built using SU-8 photoresist,then the PDMS micro channels were fabricated by replica-molding method and both PDMS and glass substrate were finally bonded into one monolithic chip by ultraviolet radiation surface modification technology.The micro-mixing mechanism was explained and the liquid mixing efficiency of the micro-mixers with three different shapes was numerically analyzed.The analysis results indicate that the liquid mixing efficiency in curving channels,especially in zigzag-micro-channels,is greatly enhanced because the second flow on cross section caused by the inertia force can effectively increase the contact area between liquids.