Analysis of shaking beam actuator for piezoelectric linear ultrasonic motor

In this paper, piezoelectric linear ultrasonic motors (PLUM) have been investigated on the elliptic trajectory of a contact point in shaking beam, which has been accomplished by two resonance vibration modes of the actuators. The actuators have generated the vibration modes, longitudinal and flexural, by two longitudinal mechanical vibrations with phase difference of pi/2. Modal and harmonic analysis of the shaking beam actuator were performed by the finite element method (FEM) to calculate a resonance frequency and a modal shape and to perform harmonic response. Experimental results proved that a contact point of the PLUM tends to move with an elliptic trajectory.