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Low substrate temperature deposition of transparent and conducting ZnO: Al thin films by RF magnetron sputtering
Authors:Ravindra Waykar  Amit Pawbake  Rupali Kulkarni  Ashok Jadhavar  Adinath Funde  Vaishali Waman  Rupesh Dewan
Affiliation:1. School of Energy Studies, Savitribai Phule Pune University, Pune 411 007, India;2. Modern College of Arts, Science and Commerce, Shivajinagar, Pune 411 005, India;3. Department of Physics, Savitribai Phule Pune University, Pune 411 007, India
Abstract:
Keywords:ZnO thin film  substrate temperature  optical properties
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