| 真空微电子管的研究 |
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| 引用本文： | 关辉,朱长纯,陈宁,张声良. 真空微电子管的研究[J]. 真空科学与技术学报, 1996, 0(5) |
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| 作者姓名： | 关辉 朱长纯 陈宁 张声良 |
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| 作者单位： | 西安交通大学真空微电子与微电子机械研究所!西安710049 |
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| 摘 要： | 综合了已有的真空微电子器件理论的研究成果，提出了真空微电子三极管优化模型，并且进行了初步计算，得到了真空微电子三极管优化模型的理论特性。同时，利用独创的无版光刻工艺制作了真空微电子三极管，进行了测试，并且与理论结果进行了比较。
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| 关 键 词： | 计算机模拟 真空器件 微结构 |
A STUEY OF VACUUM MICROELECTRONIC TRIODE |
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| Guan Hui, Zhu Changchun, Chen Ning, Zhang Shengliang. A STUEY OF VACUUM MICROELECTRONIC TRIODE[J]. JOurnal of Vacuum Science and Technology, 1996, 0(5) |
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| Authors: | Guan Hui Zhu Changchun Chen Ning Zhang Shengliang |
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| Abstract: | In this paper, we have set up an optimized model of vacuum microelectronic triode based onpresent achievements of the theory on vacuum microelectronics devices- Furthermore, we have obtainedtheoretical characteristics of vacuum microelectronic triode by means of preliminary calculation. In addition,we have fabricated vacuum microelectronic triode by means of no-mask photoetching presented by usfirstly,and have tested it,the result of which is compared with the theoretical value. |
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| Keywords: | Computer simulation Vacuum device Microstructure |
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