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| Nitrogen Contents on Tribological Properties of Magnetron Sputtered SICN Coatings | |
| 作者姓名： | TIETUN SUN |
| 作者单位： | Department of |
| 摘 要： | SiCN COATINGS have stimulated wide interestbecause they exhibit many good properties for potentialindustrial applications,such as high opticaltransparency in Infrared(IR)region,wide bandgap,chemical inertness and high refractive index,goodinsulating property,good mechanical and tribologicalproperties(high hardness,elastic modulus,low friction,etc.)1-4].Amorphous and/or hydrogenated SiCNcoatings can be prepared by various depositionmethods,such as laser ablation5],plasma-assistedchemica… |
Nitrogen Contents on Tribological Properties of Magnetron Sputtered SICN Coatings |
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| TIETUN SUN.Nitrogen Contents on Tribological Properties of Magnetron Sputtered SICN Coatings[J].Transactions of Materials and Heat Treatment,2004,25(5). | |
| Authors: | TIETUN SUN YQ FU J WEI H J DU |
| Affiliation: | 1. Department of physics, Shanghai Jiaotong University, Shanghai, China ;School of Mechanical and Production Engineering, Nanyang Technological University, Singapore 639798 2. School of Mechanical and Production Engineering, Nanyang Technological University, Singapore 639798;Singapore Institute of Manufacturing Technology, Singapore, 71 Nanyang Drive, Singapore 638075 3. Singapore Institute of Manufacturing Technology, Singapore, 71 Nanyang Drive, Singapore 638075 |
| Abstract: | Silicon carbonitride (SiCN) coatings were deposited on silicon and tungsten carbide substrates by co-sputtering silicon and carbon in argon and nitrogen mixture atmosphere using magnetron-sputtering system. The effect of the N2 concentration, RF substrate bias voltage and target current on film deposition rate, roughness, adhesion, mechanical and tribological properties of coatings were investigated. The deposition rate was found to increase with the increasing nitrogen concentration. X-ray photoelectron spectroscopy analysis showed that high nitrogen concentration in the nitrogen-argon gas mixture enhanced the incorporation of C and N but reduced the incorporation of Si. SiCN coatings have good tribological properties at a N2 concentration of approximately 60%. |
| Keywords: | SiCN coating sputtering morphology hardness wear friction |
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