| 微电容加速度计结构的热固耦合拓扑优化 |
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| 引用本文： | 谢勇君,严冬松,陈焕远,刘浩,李景明. 微电容加速度计结构的热固耦合拓扑优化[J]. 装备制造技术, 2010, 0(2): 33-35 |
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| 作者姓名： | 谢勇君 严冬松 陈焕远 刘浩 李景明 |
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| 作者单位： | 暨南大学,电气自动化研究所,广东,珠海,519070 |
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| 基金项目： | 国家863项目(2006AA4Z325);;广东省自然科学基金博士研究启动项目(9451063201002281);;广东高校优秀青年创新人才培育项目(LYM08019);;广西制造系统与先进制造技术重点实验室开放基金项目(桂科能0842006_034_K);;暨南大学青年基金项目(51208027) |
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| 摘 要： | 基于连续体结构拓扑优化的SIMP材料插值模型,建立了热固耦合场结构的有限元控制方程;通过伴随矩阵方法,研究了热固耦合场的敏度分析问题;以叉指式微电容加速度计质量块受热膨胀后,在加速度检测方向的最大形变不大于某一给定值为目标,以质量块的体积比为约束条件,建立了质量块结构的热固耦合拓扑优化模型;采用优化准则算法进行迭代求解后,得到了微电容加速度计质量块的最优拓扑形式,当工作温度在0～300℃范围内变化时,该拓扑形式在加速度检测方向的最大形变仅为23.9nm。
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| 关 键 词： | 微电容加速度计 拓扑优化 热固耦合 |
Thermo-structural Coupling Topology Optimization for Structure of Micro-capacitive Accelerometer |
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| XIE Yong-jun,YAN Dong-song,CHEN Huan-yuan,LIU Hao,LI Jing-ming. Thermo-structural Coupling Topology Optimization for Structure of Micro-capacitive Accelerometer[J]. , 2010, 0(2): 33-35 |
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| Authors: | XIE Yong-jun YAN Dong-song CHEN Huan-yuan LIU Hao LI Jing-ming |
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| Affiliation: | Institute of Electric Automation;Jinan University;Zhuhai Guangdong 519070;China |
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| Abstract: | Based on the SIMP material interpolation model of the continuum structural topology optimization,the finite element governing equations of thermo-structural coupling were established. Through the adjoint matrix method,the sensitivity analysis of the thermo-structural coupling field was studied. To use that the maximum heated deformation of the mass-block of a comb micro-capacitive accelerometer at the direction for testing acceleration was less than a given value as objective function,and the volume as the ... |
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| Keywords: | micro-capacitive accelerometer topology optimization thermo-structural coupling |
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