蓝宝石高温光纤压力传感器的设计与仿真

针对高温环境下压力测量需求,提出采用蓝宝石材料来构造适用于特殊环境下的光纤高温法珀压力传感器。基于圆形膜片压力敏感原理设计了传感器敏感单元结构尺寸,通过Comsol有限元软件建立了敏感单元模型,对敏感膜片的表面位移及应力分布情况进行了仿真,验证了传感器设计的可靠性;同时分析了传感器的温敏效应,结果表明随温度升高,传感器的灵敏度会增大,会对压力测量产生误差,约为1.51kPa/℃,上述结果为蓝宝石高温压力传感器的结构和性能优化设计提供了有效指导。

Design and Simulation of Sapphire High Temperature Optical Fiber Pressure Sensor

In response to the pressure measurement requirements in high temperature environments,sapphire material is proposed to construct optical fiber high temperature Fabry-Perot pressure sensors which is suitable for special environment.Based on the pressure sensitivity principle of the circular diaphragm,the structure size of the sensor sensitive unit is designed,and the equivalent model of the sensitive unit is established through Comsol finite element software.The surface displacement and stress distribution on the sensitive diaphragm are simulated,which verifies the reliability of the theoretical derivation.At the same time,the temperature sensitivity effect of the sensor is analyzed,and the results show that as the temperature increases,the sensitivity of the sensor will increase,which will cause an error in the pressure measurement,about 1.51 kPa/℃,The results above provide an effective guidance for optimizing the structure and performance design of sapphire high temperature pressure sensor.