| 微型触觉传感器敏感单元的力学分析 |
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| 引用本文： | 单保祥,连东侠.微型触觉传感器敏感单元的力学分析[J].传感器与微系统,1998,17(2):24-27. |
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| 作者姓名： | 单保祥 连东侠 |
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| 作者单位： | 中国科学技术大学精密机械与仪器系 |
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| 摘 要： | 通过对微型触觉传感器敏感单元的理论和有限元（ＦＥＭ）分析的对比，得出了Ｅ型方膜结构类型传感器的静态特性（变形、应力等）和动态特性（固有频率、振型等）。并讨论了静态和动态特性对结构的敏感性，为传感器的优化设计提供依据
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| 关 键 词： | 触觉传感器 有限元 静态特性 动态特性 |
Mechanics Analysis of the Sensitive Cell of Micro-Tactile Sensor |
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| Shan Baoxiang,Lian Dongxia,Wang Qimin.Mechanics Analysis of the Sensitive Cell of Micro-Tactile Sensor[J].Transducer and Microsystem Technology,1998,17(2):24-27. |
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| Authors: | Shan Baoxiang Lian Dongxia Wang Qimin |
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| Abstract: | By means of comparative analysis between theories and finite element method(FEM) of the sensitive cell of micro-tactile sensor, the static and dynamic properties(such as stress, natural frequencies, model etc.) of E-type squarediaphragm for sensors are presented. Their sensitivities to structure is also discussed. These can provide bases and supports for optimum design of this kind of sensors. |
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| Keywords: | Tactile sensor Finite element method Static properties Dynamic properties |
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