| 几种硫鎓盐类光产酸剂的合成与性质 |
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| 引用本文： | 刘娟,王争,王力元. 几种硫鎓盐类光产酸剂的合成与性质[J]. 影像技术, 2011, 23(4): 13-16,12. DOI: 10.3969/j.issn.1001-0270.2011.04.03 |
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| 作者姓名： | 刘娟 王争 王力元 |
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| 作者单位： | 北京师范大学化学学院,北京,100875 |
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| 基金项目： | 北京市自然科学基金(批准号:2082014)的支持 |
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| 摘 要： | 硫鎓盐类光产酸剂因其较高的产酸效率和好的热稳定性而广泛应用于化学增幅光致抗蚀剂中。本论文选择不同的酚化合物为原料,使之与二甲基亚砜和氯化氢反应,合成了一系列硫鎓盐化合物,研究了其在有机溶剂中的溶解性、热稳定性、紫外吸收性质及其光解特性。以低压汞灯为曝光光源,测定了该类光产酸剂的光解量子效率在0.2—0.7范围。
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| 关 键 词： | 光产酸剂 光致抗蚀剂 硫鎓盐 光解 量子效率 |
Preparation and Properties of A Few Kinds of Sulfonium Salt Photoacid Generators |
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| LIU Juan,WANG Zheng,WANG Li-yuan. Preparation and Properties of A Few Kinds of Sulfonium Salt Photoacid Generators[J]. Image Technology, 2011, 23(4): 13-16,12. DOI: 10.3969/j.issn.1001-0270.2011.04.03 |
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| Authors: | LIU Juan WANG Zheng WANG Li-yuan |
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| Affiliation: | LIU Juan,WANG Zheng,WANG Li-yuan (College of Chemistry,Beijing Normal University,Beijing 100875,China) |
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| Abstract: | Sulfonium salt is a widely used type of photoacid generator(PAG) in chemically amplified photoresists because of their high photoacid generating efficiency and thermal stability.In this paper,a series of sulfonium salts were prepared by a convenient method.Several different phenolic compounds were reacted with dimethyl sulfoxide in the presence of hydrogen chloride to give the sulfonium salt products.The properties of the sulfonium salts,including solubility in organic solvents,thermal decomposition tempera... |
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| Keywords: | photoacid generator photoresist sulfonium salt ptotolysis quantum yield |
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