Y2O3 stabilized ZrO2 thin films deposited by electron-beam evaporation: Optical properties, structure and residual stresses

This paper describes the preparation and the characterization of Y₂O₃ stabilized ZrO₂ thin films produced by electric-beam evaporation method. The optical properties, microstructure, surface morphology and the residual stress of the deposited films were investigated by optical spectroscopy, X-ray diffraction (XRD), scanning probe microscope and optical interferometer. It is shown that the optical transmission spectra of all the YSZ thin films are similar with those of ZrO₂ thin film, possessing high transparency in the visible and near-infrared regions. The refractive index of the samples decreases with increasing of Y₂O₃ content. The crystalline structure of pure ZrO₂ films is a mixture of tetragonal phase and monoclinic phase, however, Y₂O₃ stabilized ZrO₂ thin films only exhibit the cubic phase independently of how much the added Y₂O₃ content is. The surface morphology spectrum indicates that all thin films present a crystalline columnar texture with columnar grains perpendicular to the substrate and with a predominantly open microporosity. The residual stress of films transforms tensile from compressive with the increasing of Y₂O₃ molar content, which corresponds to the evolutions of the structure and packing densities.