| 硅各向异性腐蚀速率图的模拟 |
| |
| 引用本文： | 张佩君,黄庆安. 硅各向异性腐蚀速率图的模拟[J]. 固体电子学研究与进展, 2002, 22(1): 89-92 |
| |
| 作者姓名： | 张佩君 黄庆安 |
| |
| 作者单位： | 东南大学微电子中心,南京,210096 |
| |
| 基金项目： | 教育部科技研究重点项目 (0 0 0 65 ) |
| |
| 摘 要： | 利用数学软件 MATLAB,对三维中的向量进行插值计算。根据硅各向异性腐蚀特点 ,构造出了一个完整的硅各向异性腐蚀速率图。模拟结果与已有的实验数据进行了比较 ,说明这种方法可以用来模拟硅各向异性腐蚀速率
|
| 关 键 词： | 硅 腐蚀速率 各向异性腐蚀 MATLAB |
| 文章编号： | 1000-3819(2002)01-089-04 |
| 修稿时间： | 2000-05-10 |
Simulation of Anisotropic Etch-rate Diagram for Silicon |
| |
| ZHANG Peijun HUANG Qingan. Simulation of Anisotropic Etch-rate Diagram for Silicon[J]. Research & Progress of Solid State Electronics, 2002, 22(1): 89-92 |
| |
| Authors: | ZHANG Peijun HUANG Qingan |
| |
| Abstract: | For the simulation of orientation dependent etching processes it is necessary to determine the etch rates of a material under certain circumstance. According to the property of anisotropic etching of single crystal silicon, the etch rates for all three dimensional directions based on MATLAB are presented by the interpolation method. A complete etching diagram for silicon is given and compared with available experiments. |
| |
| Keywords: | Silicon etch rate anisotropic etching MATLAB |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
