Space charge effects and dynamic interactions in the case of a broad and intense ion beam bombarding an insulated substrate

A small single grid ion gun system, isolated by a quartz tube, was investigated. The dependence of the potential of the floating substrates was measured, and its dependence on grid voltage and pressure was determined. This potential could be controlled by changing the parameters of the ion gun. This seems to be a new possibility for controlled deposition of insulating materials with ion beams of low energy. And it explains results which were obtained in deposition of diamond-like carbon films on insulating substrates.