Analysis of light scattering by rough manufactured surfaces

The relationship between the roughness of a manufactured surface and the angular distribution of the light scattered by that source is presented. A one-dimensional rough surface model is considered. It has been found that the angular distribution of the light scattered in the Fraunhofer zone is proportional to the square of the Fourier transform modulus of the surface reflection function. If the peak-to-valley height of the surface roughness is small compared with the light wavelength, the angular distribution of the light scattered is proportional to the power spectrum of the profile. If the peak-to-valley height of the surface roughness is comparable with or greater than the light wavelength, the angular distribution of the light scattered can be determined by using the suggested light scatter simulating system.