| 干涉法在光栅波前检测中的应用研究 |
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| 引用本文： | 吴迪,齐向东,车英,郭林炀. 干涉法在光栅波前检测中的应用研究[J]. 长春光学精密机械学院学报, 2011, 0(2): 5-7 |
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| 作者姓名： | 吴迪 齐向东 车英 郭林炀 |
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| 作者单位： | 长春理工大学光电工程学院,长春130022 |
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| 摘 要： | 主要针对凹面衍射光栅波前检测方法进行研究。实验光路的搭建基于泰曼干涉仪检测原理,针对凹面光栅检测进行相应的改进,成功获得凹面光栅零级和一级干涉条纹,从而证明了用干涉法检验凹面光栅衍射波前的可行性,为凹面光栅的加工质量检测提供了理论依据。
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| 关 键 词： | 衍射光栅 凹面光栅 波前检测 波前像差 |
Research on Application of Interference Method for Testing Grating Wavefront |
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| WU Di,QI Xiangdong,CHE Ying,GUO Linyang. Research on Application of Interference Method for Testing Grating Wavefront[J]. Journal of Changchun Institute of Optics and Fine Mechanics, 2011, 0(2): 5-7 |
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| Authors: | WU Di QI Xiangdong CHE Ying GUO Linyang |
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| Affiliation: | (Changchun University of Science and Technology,Changchun 130022) |
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| Abstract: | In this paper,experimental optical structures have been finished based on the Twyman interferometer for testing concave grating with improvements.Zero and one order interference fringe have been obtained successfully.Wave front test of concave diffraction grating by interference is proved to be feasible,providing the quality basis of processing inspection of the concave grating. |
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| Keywords: | diffraction grating concave grating wavefront testing wavefront aberration |
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