| 激光诱导化学气相沉积制备SiC Si3n4超细粉末 |
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| 引用本文： | 许宇庆,张其土.激光诱导化学气相沉积制备SiC Si3n4超细粉末[J].硅酸盐通报,1992,11(4):51-55. |
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| 作者姓名： | 许宇庆 张其土 |
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| 作者单位： | 浙江大学材料系
(许宇庆)，浙江大学材料系(张其土) |
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| 摘 要： | 利用CWCO_2激光来加热SiH_4和C_2H_4、SiH_4和NH_3的混和气体,使SiH_4和C_2H_4、SiH_4和NH_3发生化学反应,从而得到SiC、Si_3N_4超细粉末.本文所制备的SiC、Si_3N_4超细粉末平均粒径分别为15nm、17nm,并具有颗粒大小均匀、呈球状、分散性较好、纯度高等优点.X射线衍射分析表明SiC、Si_3N_4超细粉末呈非晶态结构.
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| 关 键 词： | 碳化硅 氮化硅 沉积 激光诱导 |
SiC and Si_3N_4UItrafine Powder Made by Laser-Induced CVD Process |
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| Xu Yuqing Zhang Qitu.SiC and Si_3N_4UItrafine Powder Made by Laser-Induced CVD Process[J].Bulletin of the Chinese Ceramic Society,1992,11(4):51-55. |
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| Authors: | Xu Yuqing Zhang Qitu |
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| Abstract: | SiC and Si_3N_4 ultrafine powders have been synthesized through CW CO_2 laser-heated vapor phase reactions in the silane-ethylene and the silane-ammonia gas system respectiv(?)ly. The mean particle diameters of SiC and Si_3N_4 ultrafine powders were 15nm and 17nm respectively. Grains of the SiC and Si_3N_4 ultrafine powders prepared by this process were uniform in size, spherical in shape, highly discrete and extrencely pure. X-ray diffraction analysis rev(?)aled that SiC and Si_3N_4ultrafine powders were amorphous. |
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| Keywords: | laser SiC powder Si_3N_4power |
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