Micrometallurgy: a technique for examining the structure of binary-element thin films over a wide range of composition |
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Authors: | R. F. EGERTON,& J. C. BENNETT |
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Affiliation: | Physics Department, University of Alberta, Edmonton, Alberta, Canada T6G 2J1 |
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Abstract: | We describe a procedure for producing thin-film TEM specimens containing a thickness and/or composition gradient, utilizing an out-of-contact mask at an appropriate distance from the substrate. Imaging and diffraction capabilities of the TEM are used to examine the local structure of the film; EELS or EDX analysis provides the local elemental composition. The procedure is illustrated by results obtained from two binary-alloy systems: Se–Te (which displays a complete range of solid solubility) and Sn–Ge (where mutual solubility is very low). |
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Keywords: | Elemental analysis low-temperature TEM thin films X-ray microanalysis |
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