等离子浸没离子注入法合成氧化钛/氮化钛梯度薄膜与控制研究

使用等离子浸没离子注入和反应沉积（Plasma immersion ion implantation and reaction deposition,PIIID）的方法合成了氧化钛／氮化钛梯度薄膜。研究开发了一套由可编程逻辑控制器（Programmable Logical Control,PLC）、D／A和质量流量控制器（Mass Flow Control,MFC）组成的智能控制系统，控制金属源阴极的推进和气体成分的改变。现场使用表明，整个控制系统稳定、可靠，具有较强的抗干扰能力，能够灵活方便地设置相应的技术参数。通过显微硬度计测试，针盘式摩擦磨损试验和结合力测试，分析了控制合成的薄膜的机械性能。采用X射线衍射、扫描电镜和SMIS，分析与评价了薄膜的特性。结果表明，控制合成的Ti-O/Ti-N梯度薄膜具有良好的机械性能。

Controlling Synthesis of Ti-O/Ti-N Gradient Films by PIII

Titanium oxide and titanium nitrogen gradient films were synthesized using plasma immersion ion implantation and deposition (PIIID). A intelligentized control system, which was made of PLC,D/A and MFC, was developed to control pushing of the metal cathode source and varying gas composition. The results show that the whole system is stable and reliable, and has strong anti-interference capacity and sets flexibly correlative technological parameters. The mechanical properties of the synthesized films on silicon wafer, titanium and low temperature isotropic carbon (LTIC) were analyzed by microhardness tests, pin-on-disc wear experiments, and scratch adhesion test. X-Ray diffraction (XRD) ,secong ion mass spectroscopy(SIMS) and scanning electron microscope (SEM) were used to analysis and evaluate the properties. Good mechanical properties were achieved by controlling to synthesize Ti-O/Ti-N gradient films and discussed in this paper.