|
|||||
|
|
Low‐Cost Fabrication of Transparent Hard Replica Molds for Imprinting Lithography |
|
| Authors: | Joohee Kim Mihee Kim Min Jung Lee Ji Soo Lee Kyusoon Shin Youn Sang Kim |
| Affiliation: | 1. Department of Chemistry and Nano Science Ewha Womans University 11‐1 Daehyun‐dong, Seodaemun‐gu Seoul 120‐750 (Korea);2. Department of Nano Science and Technology Graduate School of Convergence Science and Technology Seoul National University 864‐1 Iui‐dong, Yeongtong‐gu Suwon‐si, Gyeonggi‐do 443‐72 (Korea);3. School of Chemical and Biological Engineering Seoul National University San 56‐1 Shillim‐dong, Kwanak‐gu Seoul 151‐744 (Korea) |
| Abstract: | |
| Keywords: | functional coatings hybrid materials lithography nanoimprinting patterning |