首页 | 本学科首页   官方微博 | 高级检索  
     


A Chemical Solution Approach to Epitaxial Metal Nitride Thin Films
Authors:Hongmei Luo  Yuan Lin  Haiyan Wang  Joon Hwan Lee  Natalya A Suvorova  Alexander H Mueller  Anthony K Burrell  T Mark McCleskey  Eve Bauer  Igor O Usov  Marilyn E Hawley  Terry G Holesinger  Quanxi Jia
Affiliation:1. Materials Physics and Applications Division Los Alamos National Laboratory Los Alamos, NM 87545 (USA);2. School of Microelectronics and Solid State Electronics University of Electronic Science and Technology of China Chengdu 610054 (P.R. China);3. Department of Electrical and Computer Engineering Texas A&M University College Station, TX 77843 (USA);4. Materials Science and Technology Division Los Alamos National Laboratory Los Alamos, NM 87545 (USA);5. Chemistry Division, Los Alamos National Laboratory Los Alamos, NM 87545 (USA)
Abstract:
Keywords:thin films  synthesis  nitrides  polymer‐assisted deposition  chemical solution deposition
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号