New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching |
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Authors: | Chunxiao Cong William Chandra Junus Zexiang Shen Ting Yu |
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Affiliation: | (1) Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, Singapore, 637371, Singapore; |
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Abstract: | We report a low-cost and simple method for fabrication of nonspherical colloidal lithographic nanopatterns with a long-range
order by preheating and oxygen reactive ion etching of monolayer and double-layer polystyrene spheres. This strategy allows
excellent control of size and morphology of the colloidal particles and expands the applications of the colloidal patterns
as templates for preparing ordered functional nanostructure arrays. For the first time, various unique nanostructures with
long-range order, including network structures with tunable neck length and width, hexagonal-shaped, and rectangular-shaped
arrays as well as size tunable nanohole arrays, were fabricated by this route. Promising potentials of such unique periodic
nanostructures in various fields, such as photonic crystals, catalysts, templates for deposition, and masks for etching, are
naturally expected. |
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Keywords: | Nanosphere lithography Nanopatterns Reactive ion etching Preheating Nonspherical Nonclose-packed |
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