一种自动跟踪工频陷波器的研究与设计

介绍了一种新型线性自动跟踪工频陷波器的电路结构。该陷波器应用于电子束曝光机束流测量电路中,用来抑制工频干扰对测量精度的影响。基于对自动跟踪陷波器的基本工作原理分析,陷波器采用了频率/电压转换器与压控带阻滤波器相结合的设计方案,成功地解决了工频频偏对常规工频陷波器滤波性能的严重影响问题。提出了提高抑制工频干扰能力的设计要点和电路调试方法。通过性能指标的测试和长期实际运行应用,证明陷波器满足了电子束测量中对工频干扰进行强抑制的要求,提高了电子束曝光机的制版质量。

Research and design of auto-tracking wavetrap for power frequency

This paper recommends a new structure of linear auto-tracking wavetrap for power frequency.This wavetrap is used for the anti-jamming circuit in the measurement of the electron beam current in the electron beam exposure machine.Based on the analysis of the fundamental principles of the auto-tracking wavetrap,this wavetrap adopts the design scheme of the frequency-voltage transformer combined with the voltage controlled band elimination filter.It has successfully resoved the problem under the performance influence of frequency deviation of power frequency.Its design keys for improving peformances and the adjasting method are presented in detail.Through the test of the performance index and the practical usage,this auto-tracking wavetrap is proved to be satisfactory for the interference rejection of the power frequency.