| 电子显微镜高压直流电源技术参数 |
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| 引用本文： | 樊生文,戴伟,王泽庭. 电子显微镜高压直流电源技术参数[J]. 电子测试, 2017, 0(20) |
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| 作者姓名： | 樊生文 戴伟 王泽庭 |
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| 作者单位： | 北京市变频技术工程技术研究中心,北京市电力节能关键技术协同创新中心,北京电动车辆协同创新中心,北京,100144 |
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| 摘 要： | 随着高压直流电源技术的逐渐成熟,应用于工业、农业、航天、医疗等的领域越来越普及,对高压直流电源的技术参数的要求就越来越高,纹波大小和稳定度是影响高压直流电源质量的两个关键因素.本文设计了一台90KV/1mA的高压直流电源应用于电子显微镜以及曝光机等,现对其技术参数纹波大小和稳定度进行测量,介绍了纹波的测量方法以及影响稳定度的因素.
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| 关 键 词： | 高压直流电源 纹波 稳定度 |
Electron Microscope Technology Parameters Of High Voltage DC Power Supply |
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| Fan Shengwen,Dai Wei,Wang Zeting. Electron Microscope Technology Parameters Of High Voltage DC Power Supply[J]. Electronic Test, 2017, 0(20) |
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| Authors: | Fan Shengwen Dai Wei Wang Zeting |
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| Abstract: | With the gradually mature of High-Voltage Direct Current Power Supply technology, it is popular to apply in industry, agriculture, aerospace, medical and other fields. Technical parameter requirements for High Voltage DC Power Supply is more and more high, however, ripple size and stability are two key factors affecting its quality. This paper designed a 90KV/1mA High Voltage DC Power Supply used in electron microscopy and exposure machine, etc. This paper have a measurement for ripple size and stability, and introduce the ripple measurement method and the factors that affect stability. |
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| Keywords: | High power high voltage power supply ripple stability |
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