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Calix[4]resorcinarene Derivatives as High‐Resolution Resist Materials for Supercritical CO2 Processing |
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| Authors: | Nelson M Felix Anuja De Silva Christopher K Ober |
| Affiliation: | 1. School of Chemical and Biomolecular Engineering, Cornell University, Ithaca, NY 14853 (USA);2. Department of Chemistry and Chemical Biology, Cornell University, Ithaca, NY 14853 (USA);3. Department of Materials Science and Engineering, Cornell University, Ithaca, NY 14853 (USA) |
| Abstract: | |
| Keywords: | microfabrication nanolithography photolithography supercritical fluids |