A system for the dynamic characterization of microstructures |
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Authors: | Burdess J.S. Harris A.J. Wood D. Pitcher R.J. Glennie D. |
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Affiliation: | Dept. of Mech. Eng., Newcastle upon Tyne Univ. ; |
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Abstract: | This paper describes a fully automated measurement system designed to evaluate the dynamic characteristics of micromechanical structures (millimeter dimensions). To validate the system, vibration measurements have been carried on two structures-a micromachined silicon cantilever and bridge-and the results are presented. Out-of-plane measurements show that for the cantilever, both the mode shapes and resonant frequencies agree with beam theory predictions. However, for the bridge structure, tension due to boron doping causes a change from beam-like behavior and a more complex model is required. Mode-shapes natural frequencies and modal damping are determined from data obtained by vibrating the structures using a piezoelectric mounting system and deriving the transfer function between the piezodrive voltage and beam vibrational velocity |
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