Calibrating a scanning electron microscope in two coordinates by the use of one certified dimension |
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| Authors: | Ch. P. Volk Yu. A. Novikov A. V. Rakov P. A. Todua |
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| Affiliation: | (1) NIIME and Mikron Plant, Moscow, Russia;(2) Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow, Russia;(3) Surface and Vacuum Properties Research Center, Moscow, Russia |
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| Abstract: | A method is proposed for calibrating a scanning electron microscope that corresponds completely to national standards providing unification of measurements in nanotechnology. __________ Translated from Izmeritel’naya Tekhnika, No. 6, pp. 18–20, June, 2008. |
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| Keywords: | scanning electron microscope calibration |
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